Development of a vacuum-compatible hydrodynamic spindle using an ionic liquid as a lubricant-Reference-Cited by-同舟云学术

Development of a vacuum-compatible hydrodynamic spindle using an ionic liquid as a lubricant

Published:2015-04 Issue: Volume:40 Page:124-130
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Okabe Takao,Utsumi Keita,Somaya Kei,Miyatake Masaaki,Yoshimoto Shigeka,Taniguchi Jun,Sasaki Shinya

Funder

Grant-in-Aid for Scientific Research

Publisher

Elsevier BV

Subject

General Engineering

Reference13 articles.

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3. Bisschops THJ, Soemers HMJR, Vijfvinkel J, Driessen JC, Renkens MMJ, Bouwer AG. Movable support in a vacuum chamber and its application in lithographic projection apparatus, US patent no. US 6,421,112 B1; 2002.

4. The seal system in aerostatic journal bearings for high vacuum chambers;Yoshimoto;J Tribol,2004

5. Contact-free exhaust system for vacuum compatible gas bearing guides;Heidler;Precision Eng,2012

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