Study on intelligent control system of two-dimensional platform based on ultra-precision positioning and large range-Reference-Cited by-同舟云学术

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Study on intelligent control system of two-dimensional platform based on ultra-precision positioning and large range

Published:2010-07 Issue:3 Volume:34 Page:627-633
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Chuan Yang,Qiang Zhao,Hairong Wang,Zhi Zhang

Publisher

Elsevier BV

Subject

General Engineering

Reference18 articles.

1. Linear translation mechanisms for nanotechnology applications;Chetwynd;Measurement and Control,1991

2. Present and future of micromechatronics;Ishikawa,1997

3. New microstereolithography (super-IH process) to create D freely movable micromechanism without sacrificial layer technique;Maruo,1998

4. Micromachine technology development and its applications;Akita,1998

5. Nanotechnology and its impact on manufacturing;Hocken,1993

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