Evaluation of surfaces complementarity based on high definition metrology

Author:

Yin Yaxiang,Wang Kun,Shao YipingORCID,Du Shichang,Xi Lifeng

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

General Engineering

Reference22 articles.

1. Handbook of surface and nanometrology;Whitehouse,2002

2. Process monitoring and surface characterization with in-line XPS metrology;Cabuil;Solid State Technol,2007

3. On the dependence of the leak rate of seals on the skewness of the surface height probability distribution;Lorenz;Europhys Lett,2010

4. Function maps and the role of surfaces;Whitehouse;Int J Mach Tool Manufact,2001

5. Leakage mechanism in flat seals;Bottiglione;J Appl Phys,2009

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