Extension of the range of profile surface roughness measurements using metrological atomic force microscope-Reference-Cited by-同舟云学术

Extension of the range of profile surface roughness measurements using metrological atomic force microscope

Published:2019-03 Issue: Volume:56 Page:321-329
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Misumi Ichiko,Sugawara Kentaro,Kizu Ryosuke,Hirai Akiko,Gonda Satoshi

Funder

Nippon Sheet Glass Foundation for Materials Science and Engineering

Publisher

Elsevier BV

Subject

General Engineering

Reference30 articles.

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2. Geometrical product specifications (GPS) –Surface texture: areal- Part 601: nominal characteristics of contact (stylus) instruments;ISO 25178-601,2010

3. Geometrical product specifications (GPS) –Surface texture: areal-Part 602: nominal characteristics of non-contact (confocal chromatic probe) instruments;ISO 25178-602,2010

4. ISO/TC 201/SC 9 Scanning probe microscopy, https://www.iso.org/committee/354756.html.

5. Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy;ISO 19606,2017

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