Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry
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Published:2024-01
Issue:
Volume:85
Page:174-182
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ISSN:0141-6359
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Container-title:Precision Engineering
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language:en
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Short-container-title:Precision Engineering
Author:
Kim Sungtae,
Kim YangjinORCID,
Sugita Naohiko,
Mitsuishi Mamoru
Subject
General Engineering