Author:
Olyaee Saeed,Hamedi Samaneh,Dashtban Zahra
Reference21 articles.
1. The critical role of metrology in nanotechnology;Schattenburg;SPIE Proc,2001
2. Optical lithography to 2000 and beyond;Pieter;Solid State Technol,1999
3. Optical parts and the nonlinearity in heterodyne interferometers;Hou;Prec Eng,2006
4. The international technology roadmap for semiconductors; 2008. http://public.itrs.net (accessed 21.07.08).
5. Michelson interferometry with 10 pm accuracy;Lawall;Rev Sci Instrum,2000
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