A BPNN-PID based long-stroke nanopositioning control scheme driven by ultrasonic motor-Reference-Cited by-同舟云学术

A BPNN-PID based long-stroke nanopositioning control scheme driven by ultrasonic motor

Published:2012-07 Issue:3 Volume:36 Page:485-493
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Cheng Fang,Fan Kuang-Chao,Miao Jinwei,Li Bai-Kun,Wang Hung-Yu

Publisher

Elsevier BV

Subject

General Engineering

Reference31 articles.

1. Multiscale control for nanoprecision positioning systems with large throughput;Shakir;IEEE Transactions on Control Systems Technology,2007

2. Nonlinear micro-dynamic behavior of a ball screw driven precision slide system;Ro;Precision Engineering,1992

3. Sub-micron position measurement and control on precision machine tools with laser interferometer;Steinmetz;Precision Engineering,1990

4. Stiffness of a ball screw with consideration of deformation of the screw, nut and screw thread (preloaded double nut);Takafuji;JSME International Journal. Series 3, Vibration, control engineering, engineering for industry,1990

5. Zhu Z. Design of a linear piezomotor for positioning feed drives. Ph.D. dissertation, Department of Mechanical Engineering, University of Connecticut; 1995.

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-precision radius and sphericity measurement for microspheres of micro-CMM probe tip;Measurement Science and Technology;2023-06-30

2. Research trends in methods for controlling macro-micro motion platforms;Nanotechnology and Precision Engineering;2023-05-17

3. Robust ultra-precision motion control of linear ultrasonic motors: A combined ADRC-Luenberger observer approach;Control Engineering Practice;2021-06

4. A holistic survey on mechatronic Systems in Micro/Nano scale with challenges and applications;Journal of Micro-Bio Robotics;2021-05-26

5. An Improved PID Controller for the Compliant Constant-Force Actuator Based on BP Neural Network and Smith Predictor;Applied Sciences;2021-03-17