Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry-Reference-Cited by-同舟云学术

Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry

Published:2006-01 Issue:1 Volume:30 Page:23-31
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Quan C.,Wang S.H.,Tay C.J.

Publisher

Elsevier BV

Subject

General Engineering

Reference27 articles.

1. Courtois B, Karam JM, Markus KW, Michel B, Mukherjee T, Walker JA, editors. Design, test, integration and packaging of MEMS/MOEMS. Proc SPIE 2002:4755–850.

2. Resonant silicon accelerometers in bulk micromaching technology—an approach;Burrer;IEEE J MEMS,1996

3. Line-addressable torsional micromirrors for light modulator arrays;Jaecklin;Sens Actuators A,1994

4. A study of the static characteristics of a torsional micromirror;Zhang;Sens Actuators A,2001

5. Wavelength add-drop switching using tilting mirrors;Ford;J Light Technol,1999

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A review on the prominence of porosity in tungsten oxide thin films for electrochromism;Ionics;2021-04-24

2. Quantification of nanoscale deformations using electronic speckle pattern interferometer;Optics & Laser Technology;2018-11

3. Experimental research of improved subaperture stitching method able to eliminate high-order defocus error;SPIE Proceedings;2016-09-27

4. Study on Spatial Frequency Domain Algorithm and White Light Interference System Based on NMM;Applied Mechanics and Materials;2015-03

5. Measurement of surface roughness of thin films by a hybrid interference microscope with different phase algorithms;Applied Optics;2014-09-19