Numerical analysis on high resolution optical measurement method with long working distance objective for in-line inspection of micro-structured surface-Reference-Cited by-同舟云学术

Numerical analysis on high resolution optical measurement method with long working distance objective for in-line inspection of micro-structured surface

Published:2021-01 Issue: Volume:67 Page:232-247
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Kume Hiromasa,Michihata Masaki,Takamasu Kiyoshi,Takahashi Satoru

Funder

JSPS

Publisher

Elsevier BV

Subject

General Engineering

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