A 3-axis precision positioning device using PZT actuators with low interference motions
Author:
Funder
Ministry of Science and Technology of the Republic of China
NSK Foundation for the Advancement of Mechatronics
Publisher
Elsevier BV
Subject
General Engineering
Reference32 articles.
1. An ultra-precision xyθz piezo-micropositioner-part I: design and analysis;Chang;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,1999
2. A novel long-travel piezoelectric-driven linear nanopositioning stage;Chu;Precis. Eng.,2006
3. Nanometric cutting in a scanning electron microscope;Fang;Precis. Eng.,2015
4. A comparison of fitness functions for the identification of a piezoelectric hysteretic actuator based on the real-coded genetic algorithm;Ha;Sens. Actuators A: Phys.,2006
5. Precise positioner utilizing rapid deformations of a piezo electric element;Higuchi;J. Jpn. Soc. Precis. Eng.,1998
Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A flexure-based and motion-decoupled XYZ nano-positioning stage with a quasi-symmetric structure;Precision Engineering;2024-08
2. Research on geometric error compensation of ultra-precision turning-milling machine tool based on macro–micro composite technology;The International Journal of Advanced Manufacturing Technology;2024-03-11
3. Recent trends in bionic stepping piezoelectric actuators for precision positioning: A review;Sensors and Actuators A: Physical;2023-12
4. Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining;International Journal of Precision Engineering and Manufacturing;2023-11-04
5. Normal-Stressed Electromagnetic Triaxial Fast Tool Servo for Microcutting;IEEE Transactions on Industrial Electronics;2023-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3