Design and feedforward control of a two-degree-of-freedom positioning stage with bidirectional piezoelectric drive-Reference-Cited by-同舟云学术

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Design and feedforward control of a two-degree-of-freedom positioning stage with bidirectional piezoelectric drive

Published:2023-05 Issue: Volume:81 Page:158-166
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Lian Junkai,An Dawei,Chen Mingyang,Huang Weiqing,Liang Zhongwei

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

General Engineering

Reference30 articles.

1. Machine tool feed drives;Altintas;CIRP Annals,2011

2. A novel piezoelectric inertial rotary motor for actuating micro underwater vehicles;Wang;Sensor Actuator Phys,2019

3. Robust adaptive control of piezoelectric actuators with an application to intracytoplasmic sperm injection;Tan;Asian J Control,2005

4. High-resolution monochromator for iron nuclear resonance vibrational spectroscopy of biological samples;Yoda;Jpn J Appl Phys Pt,2016

5. Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications;Koh;J Micromech Microeng,2011

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