Investigation of through-mask electrochemical machining process using a rib-connected photoresist for microcone array with large height-to-diameter ratio-Reference-Cited by-同舟云学术

Investigation of through-mask electrochemical machining process using a rib-connected photoresist for microcone array with large height-to-diameter ratio

Published:2023-05 Issue: Volume:81 Page:68-83
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Zhao Hantao,Zhang Yan,Chen Chao,Liu Xuhui,Wang Guoqian,Tang Jian

Publisher

Elsevier BV

Subject

General Engineering

Reference31 articles.

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4. Jet electrochemical micromachining of micro-grooves with conductive-masked porous cathode;Fan;Micromachines,2020

5. Fabrication of different micro patterned arrays by through mask electrochemical micromachining;Mahata;J Electrochem Soc,2019

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