1. Survey of questionnaire on ultra-precision positioning;Oiwa;J JSPE,2003
2. Trend and some simple design examples of robust control in mechatronic systems;Ito;J JSPE,2000
3. Current and future of precision positioning stage working in stepper;Wakui;J JSPE,2001
4. Control of an XY nano-positioning table for a compact nano-machine tool;Maeda;JSME Int J Ser C,2006
5. Nonlinear friction behavior of discontinuity at stroke end in a ball guide way;Tsuruta;J JSPE,2003