Cutting of polished single-crystal silicon by wire electrical discharge machining
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference20 articles.
1. High-precision large-diameter single-crystal silicon spheres: their fabrication and measurements of sphericity;Leistner;Proc. SPIE,1995
2. Diamond turning of silicon optics;Parr-Burman;Proc. SPIE,1996
3. Study on aspherical polishing of single-crystal silicon lens;Suzuki;J. Jpn. Soc. Prec. Eng.,1997
4. Fabrication and metrology of high quality synchrotron mirrors in the sub-arcsec regime;Derst;Proc. SPIE,1997
5. Chip morphology of ultra-precision diamond turning of single-crystal silicon;Yan;J. Jpn. Soc. Prec. Eng.,1999
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