1. The endless progression of Moore’s Law;Van den Hove,2022
2. Improving resolution in photolithography with a PSM;Levenson;IEEE Trans. Electron Dev.,1982
3. 0.2μm or less i-line lithography by phase-shifting-mask technology;Jinbo;IEDM Techn. Digest,1990
4. New imaging technique for 64M-DRAM;Shiraishi;Proc. SPIE,1992
5. EUV optics: Status, outlook and future;Graeupner,2022