Analysis of MEMS cantilever sensor for sensing volatile organic compounds-Reference-Cited by-同舟云学术

Analysis of MEMS cantilever sensor for sensing volatile organic compounds

Published:2022-08 Issue: Volume:16 Page:100143
ISSN:2590-0072
Container-title:Micro and Nano Engineering
language:en
Short-container-title:Micro and Nano Engineering

Author:

Guruprasad B.,Veena M.G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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1. Frequency Response Analysis of MEMS Comb-Drive Resonator Integrated With a Polymer Thin Film Layer;ELECTRICA;2024-01-31

2. Performance Analysis of Piezo Resistive MEMS Cantilever for the Detection of VOCs;2023 International Conference on Smart Systems for applications in Electrical Sciences (ICSSES);2023-07-07

3. Estimation of the Limit of Detection and effect of flow rate on micro cantilever sensor;2023 4th International Conference for Emerging Technology (INCET);2023-05-26

4. Drain current variation of extruded active area field-effect transistors on a silicon nitride membrane for low scale pressure of micro liter droplets;Microelectronic Engineering;2023-03