Solid-state capacitive pressure transducers-Reference-Cited by-同舟云学术

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Solid-state capacitive pressure transducers

Published:1986-11 Issue:3-4 Volume:10 Page:303-320
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Ko Wen H.

Publisher

Elsevier BV

Subject

General Engineering

Reference37 articles.

1. Semiconductor stress transducers utilizing the transverse and shear piezoresistance effects;Pfann;J. Appl. Phys.,1961

2. Semiconductor mechanical sensor;Wortman;IEEE Trans. Electron Devices, ED-16,1969

3. Miniature pressure transducers with a silicon diaphragm;Gieles;Philips Tech. Rev.,1970

4. An IC piezoresistive pressure sensor for biomedical instrumentation;Samaun;IEEE Trans. Biomed. Eng., BME-20,1973

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