Integrated silicon pi-fet accelerometer with proof mass-Reference-Cited by-同舟云学术

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Integrated silicon pi-fet accelerometer with proof mass

Published:1984-02 Issue:2 Volume:5 Page:119-126
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Chen P.L.,Muller R.S.,Andrews A.P.

Publisher

Elsevier BV

Subject

General Engineering

Reference4 articles.

1. Integrated silicon microbeam PI-FET accelerometer

2. A batch-fabricated silicon accelerometer

3. Micromechanical accelerometer integrated with MOS detection circuitry

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