A microminiature fluidic amplifier-Reference-Cited by-同舟云学术

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A microminiature fluidic amplifier

Published:1988-12 Issue:4 Volume:15 Page:427-433
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Zdeblick Mark J.,Barth Phillip P.,Angell James B.

Publisher

Elsevier BV

Subject

General Engineering

Reference4 articles.

1. Garret Pneumatic systems division, PO box 52-17, Phoenix, AZ 85010, U.S.A.

2. Microminiature fluidic amplifier;Zdeblick;Technical Digest IEEE Solid-State Sensors Workshop, Hilton Head, SC,1986

3. J. McVittie and C. Gonzalez, Anisotropic etching of Si using SF6 with C2ClF5 and other mixed halocarbons, Ext. Abstr. Fall Meet. Electroc

4. Field assisted glass sealing;Wallis,1975

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