A capacitive humidity sensor based on CMOS technology with adsorbing film-Reference-Cited by-同舟云学术

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A capacitive humidity sensor based on CMOS technology with adsorbing film

Published:1988-12 Issue:4 Volume:15 Page:325-335
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Parameswaran M.,Baltes H.P.,Brett M.J.,Fraser D.E.,Robinson A.M.

Publisher

Elsevier BV

Subject

General Engineering

Reference16 articles.

1. Humidity sensors: principles and applications;Yamazoe,1987

2. A thin-film resistance humidity sensor;Hijikigawa;Sensors and Actuators,1983

3. A thin-film capacitance humidity sensor;Jachowicz;Sensors and Actuators,1981

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2. Effect of Mild Sway on the Interfacial Mass Transfer Rate of Stored Liquids;Journal of Heat Transfer;2015-07-14

3. Characterization of Interfacial Mass Transfer Rate of Stored Liquids;Journal of Thermal Science and Engineering Applications;2015-06-01

4. Humidity sensitive field effect transistors;Sensors and Actuators B: Chemical;1996-09

5. Ceramic sensors for humidity detection: the state-of-the-art and future developments;Sensors and Actuators B: Chemical;1995-02

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