1. Silicon electrostatic motors;Trimmer;4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987
2. A gas chromatographic air analyser fabricated on a silicon wafer;Terry;IEEE Trans. Electron Devices, ED-26,1979
3. Micromechanics;Esashi;IVA-Rapport 309,1985
4. The fabrication of integrated flow controller;Esashi;4th Int. Conf. Solid-State Sensor and Actuators (Transducers '87), Tokyo, Japan,1987