The thermo-optical properties of the thermal electrons induced in the SiN absorption band of a silicon nitrade layer
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Published:1984-11
Issue:3
Volume:23
Page:251-282
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ISSN:0376-4583
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Container-title:Surface Technology
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language:en
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Short-container-title:Surface Technology
Author:
Sato Kenzo,Sato Akinobu
Subject
General Engineering