Properties of amorphous silicon carbide film deposited by PECVD on glass
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Chemical vapour deposition of silicon carbide and its applications
2. Infra-red transmitting materials
3. Correlation of chemical and electrical properties of plasma‐deposited tetramethylsilane films
4. Preparation of hydrogenated amorphous Si-C alloy films and their properties
5. Microhardness and other properties of hydrogenated amorphous silicon carbide thin films formed by plasma-enhanced chemical vapor deposition
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