Author:
Jensen Klavs F,Rodgers Seth T,Venkataramani Rajesh
Subject
General Materials Science
Reference58 articles.
1. Transport phenomena in epitaxy systems;Jensen,1994
2. Chemical vapor deposition processes;Kleijn,1995
3. Free molecular transport and deposition in long rectangular trenches;Cale;J Appl Phys,1990
4. Monte Carlo low pressure deposition profile simulations;Rey;J Vac Sci Technol A,1990
Cited by
57 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献