Subject
General Physics and Astronomy
Cited by
22 articles.
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1. Atom transport and the change in surface composition during ion implantation in multicomponent materials;Technical Physics;1997-10
2. Oxidation of Si implanted with nondopant, metallic ions;Journal of Materials Research;1988-10
3. Factors affecting the distributions of implanted ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-11
4. Range distributions in multiply implanted targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1984-03
5. 4.1. Compositional Studies;Methods in Experimental Physics;1983