More-energetic vapors of in situ plasmon-activated water as an environmentally friendly etchant
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Published:2024-05
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Volume:
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ISSN:1226-086X
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Container-title:Journal of Industrial and Engineering Chemistry
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language:en
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Short-container-title:Journal of Industrial and Engineering Chemistry
Author:
Kao Wei-YuORCID,
Yu Shih-Hao,
Mai Fu-Der,
Tsai Hui-Yen,
Chen Jing-Wei,
Liu Yu-Chuan