Thin-film UV–vis spectroscopy as a chemically-sensitive monitoring tool for copper etching bath
Author:
Funder
UNT
Publisher
Elsevier BV
Subject
General Chemical Engineering
Reference26 articles.
1. Practical Aspects for Subtractive Etching of High Density Interconnects;Ball,2017
2. Application of ferric chloride both as oxidant and complexant to enhance the dissolution of metallic copper
3. Printed circuit board industry
4. Copper etching with cupric chloride and regeneration of waste etchant
5. Analysis of key patents of the regeneration of acidic cupric chloride etchant waste and tin stripping waste
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Characteristic Interval Modeling Method for Simultaneous Detection of Multiple Metal Ions;Frontiers in Chemistry;2022-02-10
2. A Nonlinear Integrated Modeling Method of Extended Kalman Filter Based on Adaboost Algorithm;Frontiers in Chemistry;2021-07-30
3. Monitoring colorless electroactive chemicals in complex background based on electrochemical difference absorption spectroscopy with twin flow cells;Analytica Chimica Acta;2021-06
4. UV etched random copolymer membrane coated PBO fibers/cyanate ester wave-transparent laminated composites;Composites Part B: Engineering;2021-05
5. A spectrophotometric method for simultaneous determination of trace ions of copper, cobalt, and nickel in the zinc sulfate solution by ultraviolet-visible spectrometry;Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy;2019-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3