Miniature fiber acoustic sensors using a photonic-crystal membrane-Reference-Cited by-同舟云学术

Miniature fiber acoustic sensors using a photonic-crystal membrane

Published:2013-12 Issue:6 Volume:19 Page:785-792
ISSN:1068-5200
Container-title:Optical Fiber Technology
language:en
Short-container-title:Optical Fiber Technology

Author:

Jo Wonuk,Akkaya Onur C.,Solgaard Olav,Digonnet Michel J.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials,Atomic and Molecular Physics, and Optics,Instrumentation,Control and Systems Engineering

Reference27 articles.

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4. Silicon condenser microphones with corrugated silicon oxide/nitride electret membranes;Kressmann;Sens. Actuators. A Phys.,2002

5. Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm;Ganji;Sens. Actuators. A Phys.,2009

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