An improved formulation for scheduling an automated wet-etch station
Author:
Publisher
Elsevier BV
Subject
Computer Science Applications,General Chemical Engineering
Reference8 articles.
1. An MILP approach to automated wet-etch scheduling;Bhushan;Industrial and Engineering Chemistry Research,2003
2. Heuristic approaches for scheduling an automated wet-etch station;Bhushan;Computers and Chemical Engineering,2003
3. A Tabu search approach to scheduling an automated wet etch station;Geiger;Journal of Manufacturing Systems,1997
4. Production scheduling in a semiconductor facility producing multiple product types with distinct due dates;Kim;IEEE Transactions on Robotics and Automation,2001
5. Scheduling semiconductor manufacturing plants;Kumar;IEEE Control Systems Magazine,1994
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