An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography

Published:2006-11 Issue:23-24 Volume:49 Page:4624-4632
ISSN:0017-9310
Container-title:International Journal of Heat and Mass Transfer
language:en
Short-container-title:International Journal of Heat and Mass Transfer

Author:

Narasimhan Arunn,Karra Satish

Publisher

Elsevier BV

Subject

Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics

Reference23 articles.

1. Introduction to microlithography;Thompson,1983

2. Introduction to Microlithography;Thompson,1994

3. Handbook of microlithography, micromachining and, microfabrication;Rai-Choudhury,1997

4. Chemical amplification resists: History and development within IBM;Ito;IBM J. Res. Dev.,2000

5. Photostabilization: Comparing DUV and i-line;Mohondro;Solid State Technol.,2003

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simultaneous estimation of four parameters in a combined-mode heat transfer in a 2D porous matrix with heat generation;Numerical Heat Transfer, Part A: Applications;2017-03-19

2. Global Exponential Stabilization of a Two-Dimensional Pool-Boiling Model;IEEE Transactions on Automatic Control;2014-01

3. Constructal law of design and evolution: Physics, biology, technology, and society;Journal of Applied Physics;2013-04-21

4. Feedback stabilisation of a two-dimensional pool-boiling system by modal control;International Journal of Thermal Sciences;2012-11

5. Literature Survey of Numerical Heat Transfer (2000–2009): Part II;Numerical Heat Transfer, Part A: Applications;2011-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3