Abatement of tetrafluoromethane by chemical absorption with molten aluminum

Author:

Shi Zhongning,Cao Dao,Tang Wei,Hu Xianwei,Wang Zhaowen

Funder

National Key R&D Program of China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Management, Monitoring, Policy and Law,Waste Management and Disposal,General Medicine,Environmental Engineering

Reference47 articles.

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2. Motorola's strategy for reducing PFC emissions;Beu,1998

3. Current state of technology: perfluorocompound (PFC) emissions reduction;Beu;Int. SEMATECH Technol. Transf,1998

4. International aluminium institute anode effect survey results;Bjerke,2004

5. The reaction occurring between gaseous CF4 and oxides dissolved in different molten fluorides. Some practical aspects;Castellano;J. Appl. Electrochem.,1982

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