Investigation of Ru Focusing Mirror for 5- to 17-nm Soft X-rays from Laser-Produced Plasma-Reference-Cited by-同舟云学术

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Investigation of Ru Focusing Mirror for 5- to 17-nm Soft X-rays from Laser-Produced Plasma

Published:2013 Issue:1 Volume:41 Page:59
ISSN:0387-0200
Container-title:The Review of Laser Engineering
language:en
Short-container-title:The Review of Laser Engineering

Author:

Tomoaki INOUE¹,MOCHIZUKI Takayasu¹,Shuji MIYAMOTO¹,MASUDA Kazuya¹,AMANO Sho¹,KANDA Kazuhiro¹

Affiliation:

1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo

Publisher

Laser Society of Japan

Link

https://www.jstage.jst.go.jp/article/lsj/41/1/41_59/_pdf

Reference11 articles.

1. 1） V. Bakshi: EUV Source for Lithography (SPIE Optical Engineering Press, Bellingham WA, 2005) p.4.

2. 2） K. Fukugaki, S. Amano, A. Shimoura, T. Inoue, S. Miyamoto, and T. Mochizuki: Rev. Sci. Instrum. 77 (2006) 063114.

3. 3） T. Inoue, T. Mochizuki, K. Masuda, S. Amano, T. Sekioka, and K. Kanda: J. Phys. B At. Mol. Opt. Phys. 45 (2012) 115401.

4. 4） T. Mochizuki: EUV R & D Rep. (2003) p.105.

5. 5） T. Inoue, T. Mochizuki, S. Miyamoto, S. Amano, T. Watanabe, and K. Kanda: Jpn. J. Appl. 5 (2011) 098001.

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