EUV Light Sources by Laser-Produced Plasmas Using Cryogenic Xe and Li Targets
Author:
Affiliation:
1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo
2. Ushio Inc
Publisher
Laser Society of Japan
Link
https://www.jstage.jst.go.jp/article/lsj/36/11/36_715/_pdf
Reference14 articles.
1. 1) T. Watanabe, H. Kinoshita, K. Hamamoto, M. Hosoya, T. Shoki, H. Hada, H. Komano, and S. Okazaki: Jpn. J. Appl. Phys. 41 (2002) 4105.
2. 2) D. Myers, B. Klene, I. Fomenkov, B. Hansson, and B. Bolliger: 3rd International EUVL Symposium, Miyazaki, Novenber, 2004, So03.
3. 4) A. Shimoura, S. Amano, S. Miyamoto, and T. Mochizuki: Appl. Phys. Lett. 72 (1998) 164.
4. 5) K. Fukugaki, S. Amano, A. Shimoura, T. Inoue, S. Miyamoto, and T. Mochizuki: Rev. Sci. Instrum. 77 (2006) 063114.
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