Control of surface morphology and periodic grain boundary location of an Si film melting-crystallized by Nd: YAG laser irradiation-Reference-Cited by-同舟云学术

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Control of surface morphology and periodic grain boundary location of an Si film melting-crystallized by Nd: YAG laser irradiation

Published:2007 Issue:Supplement Volume:35 Page:124-125
ISSN:0387-0200
Container-title:The Review of Laser Engineering
language:en
Short-container-title:The Review of Laser Engineering

Author:

Horita Susumu¹

Affiliation:

1. School of Materials Science, Japan Advanced Institute of Science and Technology

Publisher

Laser Society of Japan

Link

https://www.jstage.jst.go.jp/article/lsj/35/Supplement/35_124/_pdf

Reference8 articles.

1. [1] T. Sameshima, S. Usui, and M. Sekiya, IEEE Electron Device Lett. 7,276 (1986).

2. [2] M. Ozawa, C.-H. Oh, and M. Matsumura, Jpn. J. Appl. Phys. 38, 5700 (1999).

3. [3] A. Hara and N. Sasaki, Jpn. J. Appl. Phys., Part 2 39, L1 (2000).

4. [4] C.-H. Oh, M. Ozawa, and M. Matsumura, Jpn. J. Appl. Phys. 37, L492 (1998).

5. [5] S. Horita, Y. Nakata, and A. Shimoyama, Appl. Phys. Lett. 78, 2250 (2001).

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