Process of Thin Cu Film Removal by KrF Excimer Laser.
Author:
Affiliation:
1. Department of Welding and Production Engineering, Faculty of Engineering, Osaka University
Publisher
Laser Society of Japan
Link
http://www.jstage.jst.go.jp/article/lsj1973/23/12/23_12_1081/_pdf
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Excimer laser micromachining of oblique microchannels on thin metal films using square laser spot;Sādhanā;2016-06
2. Microfeature edge quality enhancement in excimer laser micromachining of metal films by coating with a sacrificial polymer layer;Journal of Micromechanics and Microengineering;2015-05-12
3. Fabrication of periodic structures in thin metal films by pulsed laser irradiation;Journal of Nanophotonics;2007-12-01
4. Periodic lines and holes produced in thin Au films by pulsed laser irradiation;Journal of Applied Physics;2006-08-15
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