Experimental Determination of the Imaging Properties of a 200 kV Electron Microscope

Abstract

Optical transforms from a through focal series of images of amorphous films of Ge were used to measure the spatial frequencies of maximum and minimum phase contrast of a specific 200 kV lEOL electron microscope. This information was used to determine precise values for the spherical aberration coefficient and defect of focus. Under the appropriate conditions of lens excitation the spherical aberration coefficient was found to be as low as 0�94 mm. Other image defects revealed with great precision were associated with astigmatism, beam divergence and specimen drift in the microscope stage. Quantitative examples illustrating these effects are discussed.