Development of apparatus for Single-sided Wet Etching and its applications in Corrugated Membrane Fabrication
Author:
Funder
Ministry of Trade, Industry and Energy
Publisher
The Korean Sensors Society
Reference17 articles.
1. A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements
2. A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass
3. Advanced Micro- and Nano-Gas Sensor Technology: A Review
4. A review of vibration-based MEMS piezoelectric energy harvesters
5. A silicon condenser microphone with polyimide diaphragm and backplate
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1. Design and Fabrication of Nano-Sensors for Real Time Air Quality Monitoring;2022 International Conference on Data Science, Agents & Artificial Intelligence (ICDSAAI);2022-12-08
2. Effect of corrugation structure and shape on the mechanical stiffness of the diaphragm;JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY;2021-09-30
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