Mechanistic Studies of Chemical Vapor Deposition-Reference-Cited by-同舟云学术

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Mechanistic Studies of Chemical Vapor Deposition

Published:1987-10 Issue:1 Volume:38 Page:109-140
ISSN:0066-426X
Container-title:Annual Review of Physical Chemistry
language:en
Short-container-title:Annu. Rev. Phys. Chem.

Author:

Jasinski J M,Meyerson B S,Scott B A

Publisher

Annual Reviews

Subject

Physical and Theoretical Chemistry

Link

https://www.annualreviews.org/doi/pdf/10.1146/annurev.pc.38.100187.000545

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