Study of Spatial Distortion in InP Nanophotonic Membranes on Different Carrier Substrates
Author:
Affiliation:
1. Eindhoven Hendrik Casimir Institute (EHCI), Eindhoven University of Technology,Eindhoven,The Netherlands
2. Nanolab@tu/e, Eindhoven University of Technology,Eindhoven,The Netherlands
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10418252/10418244/10418368.pdf?arnumber=10418368
Reference15 articles.
1. InP membrane integrated photonics research
2. The future of multi-terabit datacenter interconnects based on tight co-integration of photonics and electronics technologies
3. Comparison of processing-induced deformations of InP bonded to Si determined by e-beam metrology: Direct vs. adhesive bonding
4. Compensating Modeling Overlay Errors Using the Weighted Least-Squares Estimation
5. Analysis Of Overlay Distortion Patterns
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics;IEEE Transactions on Semiconductor Manufacturing;2024-08
2. Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography;Micro and Nano Engineering;2024-06
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