Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube
Author:
Affiliation:
1. Department of Chemistry, College of Natural Sciences, Hanyang University, Haengdang-Dong, Seongdong-Gu, Seoul, Korea 133-791
Publisher
SAGE Publications
Subject
Spectroscopy,Instrumentation
Link
http://journals.sagepub.com/doi/pdf/10.1366/0003702054411724
Reference9 articles.
1. Near-Infrared Reflectance Analysis
2. AF fluoropolymer for optical use: spectroscopic and surface energystudies; comparison with other fluoropolymers
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