Photoelectron Spectroscopy Characterization of Diamond-like Carbon Films

Abstract

The electronic states of diamond-like hydrogenated carbon (DLC) films were studied by synchrotron radiation photoelectron spectroscopy. The valence band spectra measured at different excitation energies show the gradual emergence of the p-π band in relation to the sample annealing and ion bombardment amorphization. The p-π band of the annealed DLC was characterized by localized pz states, while the formation of the amorphous carbon surface was accompanied by appearance of the delocalized pz states, which reduce the optical gap. A simple approach permitting the extraction of the 2 p band shape from the photoelectron spectra is proposed.