Affiliation:
1. Sperry Rand Research Center, Sudbury, Massachusetts 01776
Abstract
A procedure for the determination of nitrogen, oxygen, and hydrogen by spark-source mass spectrography is described. The reduction of instrument blank levels is an important consideration in this analysis. Factors which influence the blank level include vacuum, choice of sample etch, and baking of the source. A prespark of 100–300 nC is considered an integral part of the procedure, since it apparently removes the last traces of surface impurities. Blanks below 1 at. ppm have been observed. The procedure can also be applied for the determination of carbon.
Subject
Spectroscopy,Instrumentation
Reference7 articles.
1. Determination of Nitrogen in Silicon by Solid Source Mass Spectrometry
2. Roboz J., Proc. ASTM E-14 Meeting, San Francisco, p. 572 (1963).
3. Socha A. J., and Willardson R. K., Proc. ASTM E-14 Meeting, San Francisco, p. 474 (1963).
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