Quantum-Statistical Modeling of Mixed Inert Gas ICPs

Abstract

Relative populations of excited neutral and ionic states in reduced-pressure ICPs supported by a binary mixture of helium and an additional inert gas have been shown to obey Fermi-Dirac statistical counting. A single thermodynamic temperature of 2000 K is sufficient to define the distribution of both neutral and ionic state populations. High-energy states of ionic species exhibit a “blending” between Fermi-Dirac and Boltzmann behavior. Agreement between measured relative populations and the Fermi-Dirac distribution is ∼1% overall.