Detection of Contaminants on Electronic Microcircuit Substrates by Laser Spark Emission Spectroscopy-Reference-Cited by-同舟云学术

Detection of Contaminants on Electronic Microcircuit Substrates by Laser Spark Emission Spectroscopy

Published:1992-04 Issue:4 Volume:46 Page:593-596
ISSN:0003-7028
Container-title:Applied Spectroscopy
language:en
Short-container-title:Appl Spectrosc

Author:

Ottesen David K.¹

Affiliation:

1. Sandia National Laboratories, Inorganic and Physical Chemistry Division, Livermore, California 94551-0969

Abstract

Laser spark emission spectroscopy is used to determine the elemental composition of contaminants found on electronic microcircuits fabricated on alumina substrates. This technique is particularly useful for rapid analyses of dielectric surfaces, and spatially resolved data with some degree of depth profiling information are obtained. Two specific examples are given which illustrate the utility of the method in pinpointing production problems.

Publisher

SAGE Publications

Subject

Spectroscopy,Instrumentation

Link

http://journals.sagepub.com/doi/pdf/10.1366/0003702924124952

Reference6 articles.

1. Laser microspectral analysis: a review of principles and applications

2. Real-Time Laser Spark Spectroscopy of Particulates in Combustion Environments

3. Laser spark emission spectroscopy for in-situ, real-time monitoring of pulverized coal particle composition

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