Quantitative Depth Profiling of Layered Samples Using Phase-Modulation FT-IR Photoacoustic Spectroscopy

Abstract

In phase-modulation FT-IR spectroscopy, all wavelengths in a spectrum are modulated at the same frequency and in phase. This factor makes the use of photoacoustic phase data for depth profiling samples much easier in phase modulation than in rapid scan. A method to quantitatively measure layer thickness by using the phase of a substrate spectrum peak is demonstrated with a series of samples consisting of thin polymer Alms on substrates. Additions to the basic method are demonstrated that extend its application to cases where the substrate peak is overlapped by a spectrum peak of the surface film. A linear relationship between phase angle and layer thickness extending to thicknesses greater than twice the thermal diffusion length is demonstrated. Representations of phase modulation data as a family of angle-specific spectra, as magnitude vs. phase curves, and as a power spectrum and phase spectrum pair, each of which is useful for different aspects of depth profiling, are discussed. Calculating these representations from a single pair of orthogonal interferograms is described.