Affiliation:
1. Everitt Laboratory, University of Illinois, Urbana, Illinois 61801
Abstract
The measurement of trace concentrations (1-400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced breakdown spectroscopy (LIBS). For the Column III and V hydrides such as B2H6, PH6, and AsH3, the detectability limits with the present apparatus were determined to be 1, 3, and ∼1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.
Subject
Spectroscopy,Instrumentation
Cited by
29 articles.
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