Elimination of Secondary and Tertiary Interferograms in Fourier Transform Spectroscopy of Semiconductor Wafers
Author:
Affiliation:
1. Department of Chemistry, Ohio University, Athens, Ohio 45701
Publisher
SAGE Publications
Subject
Spectroscopy,Instrumentation
Link
http://journals.sagepub.com/doi/pdf/10.1366/0003702824638575
Reference5 articles.
1. Tertiary Interferograms in Fourier Transform Spectroscopy
2. New trends in the application of Fourier transform infrared spectroscopy to analytical chemistry
3. Elimination of Thin Film Infrared Channel Spectra in Fourier Transform Infrared Spectroscopy
4. The Elimination of Interference Fringes from Infrared Spectra
5. Errors in absorbance measurements in infrared Fourier transform spectrometry because of limited instrument resolution
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