Infrared Reflection-Absorption Studies of Thin Films at Grazing Incidence

Author:

Rabolt J. F.1,Jurich M.1,Swalen J. D.1

Affiliation:

1. IBM Research Laboratory, San Jose, California 95193

Abstract

Infrared spectra of thin films (<200 Å) on metals have been observed with Fourier Transform IR spectroscopy (FT-IR) by improvements to the grazing incidence reflection methods proposed by Greenler. Theoretical extensions to the reflectivity ratio, ( R – R0) /R0 for a number of metals have been made and indicate the optimal conditions for each experiment. Grazing incidence reflection measurements of poly(methyl methacrylate) (PMMA) films (thickness 180 Å) have been made on silver-, aluminum-, copper-, and chromium-coated substrates. Although the reflectivity ratio maximizes at an angle which deviates a few degrees from pure grazing, filling factor considerations and optimal optical fields show both experimentally and theoretically that operating some ten degrees away from grazing gives better signal-to-noise spectra for reasonable accumulation times. Furthermore, a shift in the maximum of the reflectivity ratio curve is observed from one metal to another, and a comparison between silver and chromium is used to illustrate this effect on the observed IR spectra.

Publisher

SAGE Publications

Subject

Spectroscopy,Instrumentation

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3