Molecular Emission Spectra in the Radio-Frequency-Excited Inductively Coupled Argon Plasma

Abstract

Emission spectra of the molecules OH, NO, and NH have been studied in the argon inductively coupled plasma (ICP) as a function of height in the plasma, input power, and environment adjacent to the plasma. Similar studies were carried out with an ICP into which solutions of elements forming stable monoxides, such as Sc, Y, Gd, and Zr, were introduced.