Rotational Temperature in Helium, Argon, and Oxygen Microwave-Induced Plasmas: Comparison with Translational and Solid Surface Temperatures

Abstract

Translational temperature ( Tg), rotational temperature of OH ( Tr), and surface temperature ( Ts are determined in helium, argon, and oxygen plasmas. Measurements are carried out at different pressures and different flow rates as a function of microwave power input by using various methods (line broadening, pressure rise, spectroscopy, thermocouple, pyrometry). The three temperatures depend on the nature of the gas (oxygen < helium > argon) and increase with power input and pressure. Results show that Tg is of the same order of magnitude as Ts. But in all experimental conditions, Tr is always higher than Tg. Therefore, Tr is inadequate for estimating Tg. When no direct determination of Tg is available, Ts seems to give a better estimation of this important parameter.